A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

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dc.contributor.author Perelló-Roig, R.
dc.contributor.author Verd, J.
dc.contributor.author Bota, S.
dc.contributor.author Segura, J.
dc.date.accessioned 2021-02-10T06:41:18Z
dc.date.available 2021-02-10T06:41:18Z
dc.identifier.uri http://hdl.handle.net/11201/155037
dc.description.abstract [eng] CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies, requiring a challenging readout circuitry. This paper presents a transimpedance amplifier (TIA) fabricated using a commercial 0.35-µm CMOS technology specifically oriented to drive and sense monolithically integrated CMOS-MEMS resonators up to 50 MHz with a tunable transimpedance gain ranging from 112 dB to 121 dB. The output voltage noise is as low as 225 nV/Hz1/2 input-referred current noise of 192 fA/Hz1/2 at 10 MHz, and the power consumption is kept below 1-mW. In addition, the TIA amplifier exhibits an open-loop gain independent of the parasitic input capacitance mostly associated with the MEMS layout representing an advantage in MEMS testing compared to other alternatives such as Pierce oscillator schemes. The work presented includes the characterization of three types of MEMS resonators that have been fabricated and experimentally characterized both in open-loop and self-sustained configurations using the integrated TIA amplifier. The experimental characterization includes an accurate extraction of the electromechanical parameters for the three fabricated structures that enables an accurate MEMS-CMOS circuitry co-design.
dc.format application/pdf
dc.relation.isformatof https://doi.org/10.3390/mi12010082
dc.relation.ispartof Micromachines, 2021, vol. 12, num. 1, p. 82-1-82-16
dc.rights , 2021
dc.subject.classification 53 - Física
dc.subject.other 53 - Physics
dc.title A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
dc.type info:eu-repo/semantics/article
dc.date.updated 2021-02-10T06:41:19Z
dc.subject.keywords RF-MEMS
dc.subject.keywords CMOS-MEMS
dc.subject.keywords micromechanical oscillator
dc.subject.keywords transimpedance amplifier
dc.rights.accessRights info:eu-repo/semantics/openAccess
dc.identifier.doi https://doi.org/10.3390/mi12010082


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